射頻電源匹配器維修（RF MATCH）--案例
發(fā)布時間：2018-05-23 09:30瀏覽次數：
| AE | AMAT | DAIHEN | ENI | |
| 3150274 | SMG RF MATCH CVD | RMN-75A2 | D series: | DUAL series: |
| 0190-28887-001 | 0010-20525 | AMN-50H | MW-5D | MW2-30 |
| 3150595 | MARK Ⅱ POLY | RMN-50M2 | MW-10D | OTHERS |
| 3155148-001A | 0010-09416X | RMN-100B1 | MW-5D-01B | MH-1001A |
| 3155094-005 | 0010-20525 | RMN-200C | MW-5DM12 | MH-2002A |
| 0010-30687 | AMN-50B2, MF252006 | MW-25D-05M1 | RFC-5MW | |
| MDC-01A, TD0611A2 | MW-25LD | RFC-6 | ||
| CPMX-3500 | MW-50 | MHC-1001 | ||
| CPM-1000 | LD series: | MHC-2002 | ||
| MWD-25LD | VL-400 | |||
| MWD-55LD | ENI-2500W-13.56 | |||
| H series: | DFC series: | |||
| MWH-5 | 27.12mhz 3kw(000-1103-083) | |||
| MWH-25 | 2mhz,5kw(000-1103-084) | |||
| MWH-100 | ||||
| M series: | ||||
| MWM-25 | ||||
| KYOSAN | LAM | SEREN | LAM MINI | NP(NEW POWER PLASMA) |
| MBK150-TE5A | 376406 | AT50/75 | NPM-3KCAT | |
| MBK200-TE5 | 853-330951-021 | AT30 | NPM-10KASH | |
| JMK50T-TE10 | NPM-5KCN | |||
| BJK1005TE1B | NPM-2KM | |||
| MBK100-TE16A | NPM-10KAD | |||
| LAM | SEREN | LAM MINI | NP(NEW POWER PLASMA) | |
| 376406 | AT50/75 | NPM-3KCAT | ||
| 853-330951-021 | AT30 | NPM-10KASH | ||
| NPM-5KCN | ||||
| NPM-2KM | ||||
| NPM-10KAD | ||||